Model No.

A6E-6700S

Axial

X

Y

Z

θz

θx

θy

L

AX7050-S2PL

AX7050-S2PR

AZ7010-S6PL

AXG6-75VM-R

AXG6-100VM-R

AXG4-40VM-L

R

AX7050-S2PR

AX7050-S2PL

AZ7010-S6PR

AXG6-75VM-L

AXG6-100VM-L

AXG4-40VM-R

Travel Stroke

50 mm

50 mm

10 mm

± 8°

± 6°

± 8°

Screw lead

1 mm

1 mm

1 mm(斜率1:2)

N/A

N/A

N/A

Reduction ratio

N/A

N/A

N/A

1/225

1/292

1/240

Motor Specifications

CVK544BK

CVK523BK

Decomposition Energy

2 μm (Full)

2 μm (Full)

1 μm (Full)

0.0032° (Full)

0.0025° (Full)

0.003° (Full)

Positioning Precision

5 μm

5 μm

5 μm

N/A

N/A

N/A

Repeatability Precision

± 0.5 μm

± 0.5 μm

± 0.5 μm

 ± 0.003°

 ± 0.003°

 ± 0.003°

♦   Accuracy measurement description

1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual
The difference between the movement value and the target movement value, and the maximum error value is taken. This value is the unidirectional positioning accuracy.
2. Multi-point repeated positioning accuracy: within the range of the predetermined detection stroke, when the mechanical program is executed, the position accuracy obtained by repeatedly running the same program code
degree. Calculate the position deviation that occurs when the same position is repeated back and forth, and obtain the deviation value between the two.

♦   Precision introduction

1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
2. The detection of GMT high-end precision linear slide module series adopts multi-point repeated measurement, that is, multi-point quantity measurement within a fixed stroke range (points
The amount is increased or decreased according to the length of the stroke), and the actual change of the round-trip position error is recorded, in pursuit of high precision and repeatability.
3. Through the non-contact laser interferometer measurement, to ensure that the unidirectional positioning is within 10μm, and the multipoint repetitive positioning accuracy is within 1.5μm. If there is a need for higher precision and precision, please contact the regional sales/business team.

♦   For detailed specifications, please read the description for the stage and connecting cable.

♦   For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog.

♦   The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs.

GMT has defined different axis as the following figuration according to the movement direction:

Horizontal movement direction is X and Y axis.

Vertical movement direction is Z axis.

Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis.

Green arrows present the specified axis movement direction.

Motor/driver