Details
★ Light-weight and Extra-thin-It creates the wing-free thin & lighter mechanism by applying the XYθ module.
★ The cross-roller bearings have been pre-loaded, to perform the whole unit high precision and rigidity.
★ Hollow structure-It can be used for the optical inspection devices or conduction tester.
★ Longer usage life and reliable accuracy of the Alignment stage itself is guaranteed by lubrication.
★ All products are Cryogenic Treatment. It can not only significantly upgrade the toughness and operation lifetime but also improve the dimension stability of materials.
★ 3D CMM- Ensure the quality and precision of the stage.
Model No. |
GAS01-250CC-PN |
GAS01-250CC-UPJ |
GAS01-250RS-PN |
GAS01-250RS-UPJ |
GAS01-350CC-PN |
GAS01-350CC-UPJ |
GAS01-350RS-PN |
GAS01-350RS-UPJ |
Stage Size (mm) |
250x250 |
250x250 |
250x250 |
250x250 |
350x350 |
350x350 |
350x350 |
350x350 |
Base Size (mm) |
350x350 |
350x350 | 350x350 | 350x350 | 450x450 | 450x450 | 450x450 | 450x450 |
Height (mm) |
90 | 90 | 90 | 90 | 90 | 90 | 90 | 90 |
Travel Stroke (mm) |
±5x±5 | ±5x±5 | ±5x±5 | ±5x±5 | ±5x±5 | ±5x±5 | ±5x±5 | ±5x±5 |
Angle (θ)° |
±3° | ±3° | ±3° | ±3° | ±2° | ±2° | ±2° | ±2° |
Stage Material |
Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin |
Stage Surface Treatment |
Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized |
Base Material |
Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin |
Base Surface Treatment |
Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized |
Ball Screw Spec. |
Ø8-P1 | Ø8-P1 | Ø10-P2 | Ø10-P2 | Ø8-P1 | Ø8-P1 | Ø10-P2 | Ø10-P2 |
Dynamic Load Capacity (kgf) |
35 | 35 | 50 | 50 | 50 | 50 | 50 | 50 |
Static Load Capacity (kgf) |
80 | 80 | 100 | 100 | 80 | 80 | 100 | 100 |
Repeatability Accuracy (μm) |
±5 | ±1 | ±5 | ±1 | ±5 | ±1 | ±5 | ±1 |
Parallelism (μm) |
30 | 30 | 30 | 30 | 40 | 40 | 40 | 40 |
Motor Brand |
GMT | Oriental | GMT | Oriental | GMT | Oriental | GMT | Oriental |
Motor Type |
2-Phase Steppe | 5-Phase Stepper | 2-Phase Steppe | 5-Phase Stepper | 2-Phase Steppe | 5-Phase Stepper | 2-Phase Steppe | 5-Phase Stepper |
Motor Shaft |
□42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft |
Motor Model. No. |
2MS- N42D47A |
PKP544 N18B |
2MS- N42D47A |
PKP544 N18B |
2MS- N42D47A |
PKP544 N18B |
2MS- N42D47A |
PKP544 N18B |
Driver Brand |
Contact us | Oriental | Contact us | Oriental | Contact us | Oriental | Contact us | Oriental |
Driver Model. No. |
Contact us |
CVD518-K |
Contact us |
CVD518-K |
Contact us |
CVD518-K |
Contact us |
CVD518-K |
Characteristics |
♦ Ultra thin appearance Achieved with the lighted crossed roller bearings and modularized structures. ♦ High stiffness and high precision Applying preload operations on every roller bearings of stages for better rigidity and precision. ♦ Hollow structure Lightweight structure of the stages could be suitable for optical inspection devices. ♦ Lubrication system Well lubricating gives the stages longer using life and reliable accuracy. ♦ Genericity Available sizes from 160mm to 1500mm, even capable of heightening load resistance by adding driven modules. |
Applications |
♦ Panel lamination machinery ♦ Panel film laminating machines ♦ Print screen and 3D printing ♦ Angular glass cutting and grinding equipment ♦ Wafe alignment equipment ♦ P.C.D exposure equipment ♦ Software cutting equipment ♦ Semi-conductor equipment |
Structures and Lubrication System |
Transmission Theory |
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